Semiconductor device having chip crack detection structure

ABSTRACT

A semiconductor device includes a plurality of signal terminals on each of a plurality of vertically stacked semiconductor chips, each plurality of signal terminals connected to vertically aligned signal terminals of an adjacent semiconductor chip by through silicon vias, a common test terminal on each of the plurality of vertically stacked semiconductor chips connected to a vertically aligned common test terminal of an adjacent semiconductor chip by a through silicon via; a plurality of spiral test terminals on the plurality of vertically stacked semiconductor chips, each spiral test terminal connected to a non-vertically aligned spiral test terminal of an adjacent semiconductor chip by a through silicon via, and a conductive line arranged along a periphery of at least one of the plurality of vertically stacked semiconductor chips, the conductive line connected to a respective common test terminal and a respective spiral test terminal.

The present application is a Continuation application of U.S. patentapplication Ser. No. 13/461,627 filed on May 1, 2012, which is based onand claims priority from Japanese Patent Application No. 2011-111673,filed on May 18, 2011, the entire contents of which are incorporatedherein by reference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present disclosure relates to a semiconductor device having adetection test structure for a crack of a semiconductor chip (or chipcrack detection structure).

2. Description of Related Art

In manufacture of a semiconductor device, a stress or the like oncutting, mounting or heating sometimes causes a crack in a semiconductorchip. As a method of detecting such a crack, there is an example using astructure disclosed by Japanese Patent Kokai Publication No. H06-244254(Patent Document 1), for example. This detects existence of the crack bymeasuring resistance of an electric conductor provided in a periphery ofthe semiconductor chip.

Japanese Patent Kokai Publication No. 2009-54862A, which corresponds toUS2009/057925A1 (Patent Document 2) discloses an art of detectingwhether or not there is a crack in a semiconductor chip by providing awiring and a plurality of electrode pads for detecting the crack alongan entire periphery of the semiconductor chip and detecting change ofresistance between the electrode pads which are selected among theplurality of the electrode pads and connected to both ends of thewiring.

The above Patent Documents are incorporated herein by reference theretoin their entirety. The inventor has realized that in the detectionmethods disclosed in Patent Documents 1 and 2, no consideration is givento a detection of a crack of each semiconductor chip in a semiconductordevice of a stack type in which a plurality of the semiconductor chipsare stacked. If a plurality of the semiconductor chips disclosed inPatent Document 2 are stacked, in the semiconductor device of the stacktype, the pads for detecting a crack are connected in common. Therefore,even though the occurrence of a crack in any semiconductor chip of thesemiconductor device of the stack type can be confirmed, there is aproblem that the semiconductor chip having the crack can not beidentified.

The inventor has realized that if the structure disclosed in PatentDocument 1 is used for the semiconductor device of the stack type, eventhough semiconductor chips having an electric conductor 70 for crackdetection shown in FIG. 12B are stacked, the crack in the most exteriorsemiconductor chip (Slice 0) shown in FIG. 12A may be detected, but thecrack in interior semiconductor chips can not be detected.

SUMMARY

In an aspect of this disclosure, there is provided a semiconductordevice comprising a plurality of signal terminals on each of a pluralityof vertically stacked semiconductor chips, each plurality of signalterminals connected to vertically aligned signal terminals of anadjacent semiconductor chip by through silicon vias; a common testterminal on each of the plurality of vertically stacked semiconductorchips connected to a vertically aligned common test terminal of anadjacent semiconductor chip by a through silicon via; a plurality ofspiral test terminals on the plurality of vertically stackedsemiconductor chips, each spiral test terminal connected to anon-vertically aligned spiral test terminal of an adjacent semiconductorchip by a through silicon via; and a conductive line arranged along aperiphery of at least one of the plurality of vertically stackedsemiconductor chips, the conductive line connected to a respectivecommon test terminal and a respective spiral test terminal.

Another aspect of the disclosure provides such a device that comprises afirst semiconductor chip and a second semiconductor chip stacked withthe first semiconductor chip. The first semiconductor chip comprises: afirst semiconductor substrate including first and second main surfacesopposite to each other, a first penetration electrode penetratingthrough the first semiconductor substrate, a plurality of secondpenetration electrodes each penetrating through the first semiconductorsubstrate, a first terminal formed on a side of the first main surfaceof the first semiconductor substrate, the first terminal beingvertically aligned with and electrically connected to the firstpenetration electrode, a plurality of second terminals formed on a sideof the first main surface of the first semiconductor substrate, each ofthe second terminals being vertically aligned with an associated one ofthe second penetration electrodes and electrically connected to anotherone of the second penetration electrodes that is not vertically alignedwith the associated one of the second penetration electrodes, a thirdterminal formed on a side of the second main surface of the firstsemiconductor substrate, the third terminal being vertically alignedwith and electrically connected to the first penetration electrode, aplurality of fourth terminals formed on a side of the second mainsurface of the first semiconductor substrate, each of the fourthterminals being vertically aligned with and electrically connected to anassociated one of the second penetration electrodes, and a firstconductive line formed on a side of the first main surface of the firstsemiconductor substrate, the first conductive line including a first endportion electrically connected to the first terminal and a second endportion electrically connected to one of the second terminals. On theother hand, the second semiconductor chip that is stacked with the firstsemiconductor chip and comprises a second semiconductor substrateincluding third and fourth main surfaces opposite to each other, a fifthterminal formed on a side of the third main surface of the secondsemiconductor substrate, the fifth terminal being electrically connectedto the third terminal of the first semiconductor chip, a plurality ofsixth terminals formed on a side of the third main surface of the secondsemiconductor substrate, each of the sixth terminals being electricallyconnected to an associated one of the fourth terminals of the firstsemiconductor chip, and a second conductive line formed on a side of thethird main surface of the second semiconductor substrate, the secondconductive line including a third end portion electrically connected tothe fifth terminal and a fourth end portion electrically connected toone of the sixth terminals.

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A-1B are the cross-sectional view and plan view of asemiconductor device that has a stack of semiconductor chips having acrack test structure of Example 1 of the present disclosure;

FIG. 2 is a block diagram of a circuit of the semiconductor deviceaccording to Example 1 of the present disclosure;

FIGS. 3A-3B are detailed cross-sectional views of the semiconductordevice of the stack type according to Example 1;

FIGS. 4A-4B show a method of checking a crack of the semiconductor chipon each layer in the semiconductor device illustrated in Example 1;

FIG. 5 shows a modified example of the semiconductor device of thepresent disclosure;

FIG. 6 shows a further modified example of the example illustrated inFIG. 5;

FIG. 7 is a cross-sectional view of a semiconductor device according toExample 2 of the present disclosure;

FIG. 8 is a block diagram of a circuit in the semiconductor deviceaccording to Example 2 of the present disclosure;

FIGS. 9A-9C are cross-sectional views illustrating Example 3 of thepresent disclosure;

FIG. 10 is a cross-sectional view illustrating an example of mountingeach device of Examples on a printed board;

FIG. 11 is a cross-sectional view illustrating another example ofmounting each device of Examples on a printed board; and

FIGS. 12A-12B are cross-sectional and plan views illustrative of aprototype device.

PREFERRED EXAMPLES Example 1

The disclosure will be now described herein with reference toillustrative exemplary embodiments. Those skilled in the art willrecognize that many alternative exemplary embodiments can beaccomplished using the teachings of the present disclosure and that thedisclosure is not limited to the exemplary embodiments illustrated forexplanatory purposes.

FIGS. 1A-1B are the cross-sectional view and a plan view of asemiconductor device 25 in which four semiconductor chips are stacked inlayers, the semiconductor chip having a crack test structure accordingto Example 1 of the present disclosure. FIG. 1B is the plan view in adirection of an arrow of FIG. 1A, and FIG. 1A is the cross-sectionalview along an A-A′ line of FIG. 1B. In this Example, first, a chip stackof memory devices (semiconductor chips) 21-24 is formed, and secondlymounted on a memory controller (not illustrated) and an interposer (notillustrated) to manufacture the semiconductor device of the stack type.The present disclosure can be also applied to a chip stack including notonly the stack of the memory device, but also any device (a logicelement and the like) other than the memory device.

FIG. 2 is a circuit block diagram of Example 1 illustrating in FIGS.1A-1B. An internal circuit 15 includes a memory cell array 11 havingmemory cells, a read/write-controlling circuit 12 and the like. Theread/write-controlling circuit 12 is a circuit to control an operationof writing data to the memory cell array 11 and an operation of readingdata from the memory cell array 11. Each circuit included in theinternal circuit 15 is connected to a corresponding terminal among aplurality of signal terminals 20 a, 20 b, 20 c and 20 d. Each of thesignal terminals 20 a, 20 b, 20 c and 20 d is connected to acorresponding one of through-silicon vias TSVs that are provided aspenetration electrodes penetrating through a semiconductor (silicon)substrate, and each circuit in the internal circuit 15 sends/receives asignal to/from a memory controller through the correspondingthrough-silicon via TSV.

The signal terminals 20 a-20 d include a clock terminal, commandterminal, address terminal and data terminal. The clock terminalreceives a clock signal CLK supplied from an external, the commandterminal receives a command signal CMD from the external, and theaddress terminal receives an address signal ADD supplied from theexternal. The data terminal receives data DATA supplied from theread/write-controlling circuit 12 and outputs the data to the externalduring the reading operation, and receives the data DATA supplied fromthe external and sends the data to the read/write-controlling circuit 12during the writing operation. The read/write-controlling circuit 12controls the reading operation and writing operation of the memory cellarray 11 according to the clock signal CLK, command signal CMD andaddress signal ADD.

Although FIG. 2 illustrates a (front side) first test terminal 621 h and(front side) second test terminals 622 h-625 h disposed along aperiphery of the semiconductor chip 21, this is illustrated for thepurpose of clearly indicating the electrical connection of thesemiconductor chip 21. The (front side) first test terminal 621 h and(front side) second test terminals 622 h-625 h are preferably disposedas illustrated in FIG. 1B so that a part of a conductive line 61 for thecrack check which is disposed along the periphery is made longer.

As illustrated in FIG. 1B, on the front side of the semiconductor chip(e.g., memory device) 21 including the internal circuit 15, theconductive line 61 for the crack check is provided on the semiconductorchip along the periphery of the semiconductor chip. When the conductiveline 61 is broken by causing a crack in the semiconductor chip, forexample, the resistance of the conductive line increases unusually. Theincrease of the resistance of the conductive line 61 may be measuredthrough the test terminals 62.

One end of the conductive line 61 is connected to the test terminal 621h (first test terminal), and the other end is connected to the testterminal 625 h (one of second test terminals). The connection relationmay be same as in any of the semiconductor chips 21-24. Namely, it isunnecessary to manufacture the semiconductor chips 21-24 as a pluralityof the memory chips having different connections of the conductive line61 and the front side test terminals from one another.

As shown in FIG. 1B, in the semiconductor chip 21, five (front side)test terminals 62 h (621 h-625 h) for the crack test are formed in orderfrom the left side of the figure. On the opposite surface (back side),five (back side) test terminals 62 t (621 t-625 t) (see further FIGS.3A-3B) for the crack test are also formed corresponding to the (frontside) test terminals 62 h (621 h-625 h), that is, at opposite positionsthrough a substrate. Among them, the front side test terminal 621 h andback side test terminal 621 t are also referred to as the first testterminals (the terminals connected making a pair), the front side testterminals 622 h-625 h and back side test terminals 622 t-625 t are alsoreferred to as the second test terminals (the terminals being disposedat positions opposing one another to form a pair, but not connected soas to form a pair).

The front side test terminal 621 h and back side test terminal 621 t,which are a pair of the first test terminals, are electrically connectedto each other with a through-silicon via TSVT1 for the test. On theother hand, the front side test terminal 622 h, which is one of thesecond test terminals, is connected not to the back side test terminal622 t disposed at a position opposite to itself, but to the back sidetest terminal 625 t with a through-silicon via TSVT2. The front sidetest terminal 623 h is connected to the back side test terminal 622 t,the front side test terminal 624 h is connected to the back side testterminal 623 t, and the front side test terminal 625 h is connected tothe back side test terminal 624 t, with corresponding through-siliconvias TSVT3-5, respectively. That is, each front side test terminal isconnected to the back side terminal disposed at a position correspondingto the next terminal. As described below, this formulation is intendedfor making a connection mode of the through-silicon vias TSVT2-5 of thememory devices in a spiral manner (so that a relative horizontalposition is changed when going upward, namely, to the next stage (layer)of the stack) when the memory devices 21-24 are stacked.

FIGS. 3A-3B show a detailed cross-sectional view of the semiconductordevice of the stack type in FIGS. 1A-1B, FIG. 3A is a cross-sectionalview of one semiconductor chip (which is in common to 21-24), and FIG.3B is a cross-sectional view of the semiconductor device in which foursemiconductor chips 21-24 illustrated in FIG. 3A are stacked. Forconvenience, FIG. 3B is illustrated upside down as compared with FIG.3A. That is, FIG. 3B illustrates the example in which the semiconductorchips are stacked facing downward, and, however, the present disclosuremay be applied to a device in which the semiconductor chips are stackedfacing upward. A substrate 10 of the semiconductor chip has asemiconductor substrate and a device layer including a multi-layeredstructure.

The conductive line 61 is illustrated by broken lines in FIG. 3B inorder to schematically indicate the electrical connections although theconductive line 61 is actually provided along the periphery (see FIG.1B) of the surface of the memory chip and therefore does not appear inthe cross-sectional view.

The front side test terminals 621 h of the semiconductor chips 21-24 areconnected in common through the back side test terminals 621 t of thechips in the next stage (on the down side). The front side test terminalof the lowest semiconductor chip 21 in the figure is open because thereis no chip in the next stage.

The front side test terminals 622 h-625 h of the semiconductor chips21-24 are connected through the through-silicon vias TSVT2-5, shiftingthe terminal to the next. Giving an example concretely, the front sidetest terminal 625 h of the top semiconductor chip 24 in the figure iselectrically connected to the front side test terminal 624 h of thesemiconductor chip 21 through the back side test terminal 625 t of thesemiconductor chip 23, front side test terminal 622 h of thesemiconductor chip 23, the back side test terminal 622 t of thesemiconductor chip 22, the front side test terminal 623 h of thesemiconductor chip 22 and the back side test terminal 623 t of thesemiconductor chip 21. In a similar way, the front side test terminal625 h of the semiconductor chip 23 is electrically connected to thefront side test terminal 623 h of the semiconductor chip 21, and thefront side test terminal 625 h of the semiconductor chip 22 iselectrically connected to the front side test terminal 622 h of thesemiconductor chip 21.

Referring to the above structure focusing on the electrical connectionrelation of the conductive lines 61, one ends of the conductive lines 61of the semiconductor chips 21-24 (the ends on a side connected to thefront side test terminal 621 h) are connected to the front side testterminal 621 h of the semiconductor chip 21 in common. On the otherhand, the other ends (the ends on a side connected to the front sidetest terminal 625 h) are connected to the corresponding one of the frontside test terminals 622 h-625 h of the semiconductor chip 21,respectively. Concretely, the other end of the conductive line 61 of thesemiconductor chip 21 is electrically connected to the front side testterminal 625 h of the semiconductor chip 21, the other end of theconductive line 61 of the semiconductor chip 22 is electricallyconnected to the front side test terminal 622 h of the semiconductorchip 21, the other end of the conductive line 61 of the semiconductorchip 23 is electrically connected to the front side test terminal 623 hof the semiconductor chip 21, and the other end of the conductive line61 of the semiconductor chip 24 is electrically connected to the frontside test terminal 624 h of the semiconductor chip 21.

According to the above structure, by measuring the resistance betweenthe front side test terminal 621 h of the semiconductor chip 21 and anyone of the front side test terminals 622 h-625 h of the semiconductorchip 21, the existence of a crack in each of the semiconductor chips21-24 can be checked even in the stacking state, that is, when there isa crack in the memory chip of any semiconductor chip in the stackingstate, it can be identified which chip has the crack.

FIGS. 4A-4B illustrate a method of checking a crack of eachsemiconductor chip in the semiconductor device illustrated in FIGS.1A-1B. FIG. 4A illustrates the crack check of the semiconductor chip 21,and FIG. 4B illustrates the crack check of the semiconductor chip 24.When the semiconductor chip 21 is checked for a crack, the resistancebetween the test terminal 621 and the test terminal 625 may be measured,and when the semiconductor chip 24 is checked for a crack, theresistance between the test terminal 621 and the test terminal 624 maybe measured. In this way, even after stacked, each semiconductor chipcan be individually checked for a crack.

In this Example, because each of the group of the front side testterminals (621 h-625 h) and the group of the back side test terminals(621 t-625 t) located in the positions opposite to the front side testterminals is arrayed along a straight line (linearly), namely in a row,the front side test terminal 622 h has no test terminal at a nextposition on the opposite surface (back side) and therefore is connectedto the back side test terminal 625 t which is located at the other endon the opposite surface. However, these test terminals may be disposedin a ring-shaped manner, for example (not illustrated). In this case,each of the test terminals on the both surfaces can be connected to testterminal on the opposite surface, shifting to the next (one by one).When such semiconductor chips are stacked as illustrated above, thethrough-silicon vias TSVT2-5 of the semiconductor chips are connected ina spiral manner as a whole.

Although any one test terminal is regularly connected to the next testterminal on the opposite surface in this Example, the effect of thepresent disclosure may be also obtain even if the test terminal isregularly connected to a terminal positioned, by one or more testterminals away, on the opposite surface. However, because there is adisadvantage such that the structure becomes complex, it is preferredthat the test terminal is connected to the test terminal disposed at aposition next to the opposite terminal, which is simplest.

FIG. 5 illustrates a modified example of a semiconductor deviceaccording to the present disclosure. As illustrated in FIG. 5, there isa semiconductor device having support bumps 45 for mounting. The supportbumps 45 for mounting are assigned to the first terminals for the crackcheck. The center bumps are often difficult to be used for the testbecause of determined ball assign. On the other hand, there is anadvantage that a support ball(s) may be used as the test terminal forthe crack check because it is not necessary to guarantee electriccharacteristics of the support ball.

FIG. 6 illustrates a further modified example from the exampleillustrated in FIG. 5. As illustrated in FIG. 6, a pad 46 is providedbetween support bumps 45 for the mounting and connected to the supportbump to put the semiconductor device to the test from the pad 46. Whencontact with the support bump 45 is difficult, and when the contact withsupport bump 45 has influence on the mounting, the contact with thesupport bump 45 is impossible for the test. In this case, it is possibleto check a crack by contacting with the pad 46.

Example 2

FIG. 7 is a cross-sectional view of a semiconductor device according toExample 2 of the present disclosure. A selector 55 and third testterminals 626 h and 626 t (front and back) that are connected by athrough-silicon via (TSV) through the semiconductor chip are provided ineach of the semiconductor chips (memory devices) 21-24, and the selector55 switches an output among a plurality of input signals correspondingto an output signal from a mode resister 47 (see FIG. 8) of eachsemiconductor chip having the selector itself. That is, it is possibleto perform output of the selector 55 by changing setting of the moderesister 47 with a mode register set command.

FIG. 8 is a circuit block diagram of the semiconductor device accordingto Example 2. Signal terminals 20 a-20 d include a clock terminal,command terminal, address terminal and data terminal. The clock terminalreceives a clock signal CLK supplied from the external, the commandterminal receives a command signal CMD from the external, and theaddress terminal receives an address signal ADD supplied from theexternal. The data terminal receives data DATA supplied from theread/write-controlling circuit 12 and outputs the data to the externalduring the reading operation, and receives the data DATA supplied fromthe external and sends the data to the read/write-controlling circuit 12during the writing operation. The read/write-controlling circuit 12controls reading operation and writing operation of the memory cellarray 11 according to the clock signal CLK, command signal CMD andaddress signal ADD.

Although FIG. 8 illustrates a (front side) first test terminal 621 h and(front side) second test terminals 622 h-625 h disposed along aperiphery of the semiconductor chip 21, this is illustrated for thepurpose of clearly indicating the electrical connection of thesemiconductor chip 21. The (front side) first test terminal 621 h and(front side) second test terminals 622 h-625 h are preferably disposedas illustrated in FIG. 1B so that a part of a conductive line 61 for thecrack check which is disposed along the periphery is made longer.

The test output controlling circuit 47 is a mode register, for example,and forms a test output controlling signal, which switches over theoutput of the selector 55, corresponding to the command signal CMD andaddress signal ADD and supplies it to the selector 55. The selector 55electrically connects any one of the (front side) second test terminals622 h-625 h with a (front side) third test terminal 626 h correspondingto the test output controlling signal.

In a memory system in which the memory devices 21-24 and memorycontroller are stacked, the test terminal 621 h of FIG. 7 may be used asa ground terminal, and the third test terminal 626 h of FIG. 7 may beconnected to one of terminals (622 h-625 h) that are used for ordinaryoperation through the selector 55. According to this structure, thememory system can detect a crack of each semiconductor chip withoutincreasing an external terminal (SB). That is, a crack of eachsemiconductor chip can be detected by a leakage current between the testterminals 626 h and 621 h.

Example 3

FIGS. 9A-9C illustrates Example 3. Same elements as FIGS. 3A-3B areindicated by the same numbers, and explanation for them is omitted. Inthis Example, a top chip 24′ does not have a through-silicon via, whichis different from other semiconductor chips 21-23. It is unnecessary toprovide through-silicon vias in the top chip 24′ because thesemiconductor chips 21-23 and 24′ are stacked so that a surface on whicha circuit 15 is formed in a downward-facing manner. A step of formingthrough-silicon vias is merely omitted, the memory circuit, testterminal, signal terminal, multi-layered conductive line connecting eachthrough-silicon via with the corresponding terminal and the like may beformed as same as other semiconductor chips 21-23. The crack check forthe top chip 24′, including that for other semiconductor chips 21-23,may be performed in a same way as in the example of FIGS. 3A-3B.

FIG. 10 illustrates an example of mounting a semiconductor chip stack 10according to Examples 1-3. For simplification, the front side and backside test terminals for the crack check, conductive line, andthrough-silicon vias for the test are omitted. In this example, eachchip in the semiconductor chip stack 10 is formed as a general-purposememory (e.g., DRAM), and the stack 10 are mounted on a memory controller48 of controlling each general-purpose memory. The clock terminal,command terminal, address terminal and data terminal of each memory21-24 (24′) are connected in common, and connected to a correspondingterminal of the memory controller 48, respectively. The memorycontroller 48 is mounted on a package substrate 40, and a multi-chipmodule is made by sealing the whole with a resin 50. This module ismounted on a circuit board 80 that is a mother board, together withother semiconductor chip(s) such as a MPU, CPU and the like and electriccomponent(s). The package substrate 40 may have an insulator and aconductor(s) formed on a surface and/or inside of the insulator, and bealso referred to as a circuit board. The package substrate 40 may besimilar to the circuit board 80 as the mother board. Each of the packagesubstrate 40 and the circuit board 80 is formed as a wiring boardincluding a plurality of wirings (or interconnection lines). Thesewirings or interconnection lines may be formed as a multi-level wiringstructure.

FIG. 11 illustrates other example of mounting a semiconductor chip stack10 according to Examples 1-3. For simplification, the front side andback side test terminals for the crack check, conductive line, andthrough-silicon vias for the test are omitted. In this mounting example,each chip of the semiconductor chip stack 10 as a core memory does nothave an interface to the memory controller. An interface chip 60 havingan interface function operates for the interface. The chip 60 is mountedon the package substrate 40, and the semiconductor chip stack 10 ismounted on the chip 60. On the printed circuit board 80 as a motherboard, this module and a memory controller 70 are mounted.

A microprocessor/microcontroller itself such as a MPU and CPU may have afunction of the memory controllers 48 and 70. The memory controller 48and/or interface chip 60 may be mounted on the circuit board 80 withoutthe package substrate 40.

Although the present disclosure has been explained based on the aboveexample, it should be noted that the present disclosure may be changedand modified within the scope of the entire disclosure (including claimsand drawings) based on the basic technical idea. Also it should be notedthat any combination and/or selection of the disclosed and/or claimedelements (including the figures) may be available within the scope ofthe claims. That is, it should be noted that the present disclosure mayinclude any modification and/or correction that a skilled person in theart could make according to the entire disclosure including claims anddrawings and the technical idea.

What is claimed is:
 1. A semiconductor device comprising: a plurality ofsignal terminals on each of a plurality of vertically stackedsemiconductor chips, each plurality of signal terminals connected tovertically aligned signal terminals of an adjacent semiconductor chip bythrough silicon vias; a common test terminal on each of the plurality ofvertically stacked semiconductor chips connected to a vertically alignedcommon test terminal of an adjacent semiconductor chip by a throughsilicon via; a plurality of spiral test terminals on the plurality ofvertically stacked semiconductor chips, each spiral test terminalconnected to a non-vertically aligned spiral test terminal of anadjacent semiconductor chip by a through silicon via; and a conductiveline arranged along a periphery of at least one of the plurality ofvertically stacked semiconductor chips, the conductive line connected toa respective common test terminal and a respective spiral test terminal.2. The semiconductor device as claimed in claim 1, wherein theconductive line is arranged along the entire of the periphery.
 3. Thesemiconductor device as claimed in claim 1, wherein the semiconductorchips are identical chips.
 4. The semiconductor device as claimed inclaim 1, wherein the semiconductor chips are memory chips.
 5. Thesemiconductor device as claimed in claim 1, further comprising acontroller chip connected to the signal terminals of a bottomsemiconductor chip of the plurality of vertically stacked semiconductorchips.